US 12,090,590 B1
Six-degree-of-freedom air-floating moving apparatus
Minjie Lu, Wuxi (CN); and Yanyan Jiang, Wuxi (CN)
Assigned to WUXI XIVI SCIENCE AND TECHNOLOGY CO., LTD., Wuxi (CN)
Filed by WUXI XIVI SCIENCE AND TECHNOLOGY CO., LTD., Wuxi (CN)
Filed on May 6, 2024, as Appl. No. 18/655,355.
Application 18/655,355 is a continuation of application No. PCT/CN2024/079805, filed on Mar. 4, 2024.
Claims priority of application No. 202311302476.6 (CN), filed on Oct. 10, 2023.
Int. Cl. B23Q 1/62 (2006.01); F16C 29/02 (2006.01); G03F 7/00 (2006.01); H01L 21/68 (2006.01)
CPC B23Q 1/623 (2013.01) [F16C 29/025 (2013.01); G03F 7/70716 (2013.01); H01L 21/68 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A six-degree-of-freedom air-floating moving apparatus, comprising a base platform (1), wherein a floating platform (2) is provided above the base platform (1), a micromotion platform (3) is provided above the floating platform (2), the base platform (1) is provided with an X-axis moving assembly (4), the floating platform (2) is provided with a Y-axis moving assembly (5), the X-axis moving assembly (4) is capable of driving the floating platform (2) to move, the Y-axis moving assembly (5) is capable of driving the micromotion platform (3) to move, and a damping assembly (6) is connected to a bottom of the micromotion platform (3);
the Y-axis moving assembly (5) comprises a Y-axis linear motor (50) and a sliding platform (51), the Y-axis linear motor (50) is fixed below the floating platform (2), the sliding platform (51) is provided on the floating platform (2) and connected with the Y-axis linear motor (50), and the micromotion platform (3) is provided above the sliding platform (51) through the damping assembly (6);
the damping assembly (6) comprises a bottom plate (60) fixed at an upper end of the sliding platform (51), a first damping member (61) supporting the micromotion platform (3) is provided in the center of the bottom plate (60), a plurality of second damping members (62) around the first damping member (61) are provided on the bottom plate (60), a first connection pipe (63) is provided between the first damping member (61) and any of the second damping members (62), and a second connection pipe (64) is provided between the adjacent second damping members (62);
the first damping member (61) comprises a base (610) fixed to the bottom plate (60), a sleeve (611) is fixed in the base (610), a piston (612) is slidably connected in the sleeve (611), a rubber joint (613) is connected to an upper part of the piston (612), the rubber joint (613) supports the bottom of the micromotion platform (3), a cylindrical spring (614) is connected between the rubber joint (613) and the piston (612), a plurality of air holes (615) are provided in a side wall of the sleeve (611), and a plurality of vertical joints (616) are provided on a side wall of the base (610); and
the bottom plate (60) is a square plate, the second damping member (62) comprises a cylindrical air bag (620), a plurality of the cylindrical air bags (620) are located at four corners of the bottom plate (60), respectively, the cylindrical air bag (620) is communicated with an interior of the base (610) through the first connection pipe (63), and the adjacent cylindrical air bags (620) are communicated through the second connection pipe (64).