| CPC H10D 64/513 (2025.01) [H10D 12/038 (2025.01); H10D 30/611 (2025.01); H10D 30/658 (2025.01); H10D 62/154 (2025.01); H10D 62/158 (2025.01); H10D 62/393 (2025.01)] | 5 Claims |
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1. A semiconductor device comprising:
a semiconductor substrate having an element region and a peripheral region disposed on a periphery of the element region;
a plurality of trenches defined on an upper surface of the semiconductor substrate, each of the plurality of trenches extending in a first direction along the upper surface of the semiconductor substrate, the plurality of trenches being arranged spaced apart from each other in a second direction that is along the upper surface of the semiconductor substrate and perpendicular to the first direction;
a gate insulating film covering an inner surface of each of the plurality of trenches; and
a gate electrode disposed in each of the plurality of trenches and insulated from the semiconductor substrate by the gate insulating film,
wherein the element region includes:
an n-type source region that is exposed on the upper surface of the semiconductor substrate and is in contact with the gate insulating film disposed in a corresponding trench;
a p-type contact region that is exposed on the upper surface of the semiconductor substrate;
a p-type body region that is in contact with the gate insulating film disposed in the corresponding trench at a position below the source region, and is in contact with the contact region;
an n-type drift region that is in contact with the gate insulating film disposed in the corresponding trench at a position below the body region, and is separated from the source region by the body region;
a p-type bottom region that is disposed below the corresponding trench and spaced from a bottom surface of the corresponding trench, and is surrounded by the drift region; and
a plurality of p-type connection regions that connects the body region and the bottom region, each of the plurality of p-type connection regions extending in the first direction, and the plurality of p-type connection regions being arranged spaced apart from each other in the second direction,
wherein the element region has outer side portions at opposite ends of the element region in the second direction, and a central portion defined between the outer side portions, and
wherein an interval in the second direction between the connection regions provided in at least one of the outer side portions is greater than an interval in the second direction between the connection regions provided in the central portion.
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