US 12,417,903 B2
Physical vapor deposition source and chamber assembly
Sathiyamurthi Govindasamy, Coimbatore (IN); Harish V. Penmethsa, Dublin, CA (US); Suresh Palanisamy, Coimbatore (IN); Naresh Kumar Asokan, Coimbatore (IN); and Karunakaran Nataraj, Coimbatore (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 16, 2023, as Appl. No. 18/110,668.
Prior Publication US 2024/0282558 A1, Aug. 22, 2024
Int. Cl. H01J 37/34 (2006.01)
CPC H01J 37/3408 (2013.01) [H01J 37/3452 (2013.01); H01J 37/3455 (2013.01); H01J 2237/002 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A magnetron translation assembly, comprising:
a first linear actuator assembly comprising:
a first mount that is configured to be positioned along a first rail is aligned in a first direction; and
a first actuator that is configured to position the first mount along the first rail;
a second linear actuator assembly comprising:
a second mount that is configured to be positioned along a second rail aligned in a second direction that is perpendicular to the first direction, wherein the first linear actuator assembly is coupled to a mounting surface of the second mount; and
a second actuator that is configured to position the second mount and the first linear actuator assembly along the second rail;
a magnet assembly comprising an inner pole having an inner pole piece and an outer pole having an outer pole piece, wherein the inner pole piece and the outer pole piece are oriented parallel to a plane and have opposing magnetic polarities; and
a rotation actuator coupled between a mounting surface of the first mount of the first linear actuator assembly and the magnet assembly, wherein the rotation actuator is configured to rotate the magnet assembly about an axis, wherein the first and second actuators simultaneously translate the magnet assembly along the first and second directions, and wherein the first and second actuators are separately controlled from the rotation actuator.