US 12,416,762 B2
Tunable optical filter device
Bin Guo, Shenzhen (CN)
Assigned to SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD., Shenzhen (CN)
Appl. No. 17/779,670
Filed by SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD, Shenzhen (CN)
PCT Filed Sep. 25, 2019, PCT No. PCT/CN2019/107818
§ 371(c)(1), (2) Date May 25, 2022,
PCT Pub. No. WO2021/056257, PCT Pub. Date Apr. 1, 2021.
Prior Publication US 2023/0341629 A1, Oct. 26, 2023
Int. Cl. G02B 6/293 (2006.01); G02B 26/00 (2006.01)
CPC G02B 6/29359 (2013.01) [G02B 26/001 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A tunable optical filter device, wherein the device comprises a first glass film having a first mirror and a second glass film having a second mirror, and the surfaces of the first glass film and the second glass film on which the first mirror and the second mirror are located are bonded to each other at the periphery through a bonding compound to form a cavity between the first mirror and the second mirror, and the first glass film or the second glass film are provided with a driving unit for directly driving deformation of the first glass film and/or the second glass film and thereby creating a movement thereof, at least a part of the driving unit used to drive the deformation is arranged outside the cavity between the first mirror and the second mirror, and wherein a surface of the second glass film opposite to the second mirror is provided at the periphery with a support member formed by silicon.