| CPC C23C 14/042 (2013.01) [B23K 26/0093 (2013.01); B23K 26/032 (2013.01); B23K 26/0604 (2013.01); B23K 26/0876 (2013.01); B23K 26/362 (2013.01); B23K 26/40 (2013.01); H10K 71/00 (2023.02)] | 15 Claims |
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1. A mask manufacturing equipment comprising:
a first stage on which a mask frame is disposed, the mask frame including a plurality of cell openings arranged in a first direction and a second direction intersecting the first direction;
a transfer module that places a plurality of cell masks on the mask frame to respectively overlap the plurality of cell openings of the mask frame and the plurality of cell masks;
a camera module that photographs the plurality of cell masks;
a first processing module that irradiates a first laser beam between a border portion corresponding to a portion of the mask frame adjacent to an N-th cell opening and a first edge area of an N-th cell mask disposed on the border portion when the first processing module is positioned under the N-th cell mask; and
a second processing module that irradiates a second laser beam to a boundary area between the first edge area of the N-th cell mask and a second edge area of the N-th cell mask extending from the first edge area when the second processing module is positioned over the N-th cell mask, wherein N is a natural number,
wherein the camera module is disposed over the N-th cell mask and the first processing module is disposed under the N-th cell mask, and the camera module and the first processing module are aligned to each other in a vertical direction when the first processing module irradiates the first laser beam and the camera module photographs the N-th cell mask,
the second edge area of the N-th cell mask is bent toward the camera module,
the camera module includes a plurality of camera modules,
the plurality of camera modules comprise:
a base plate having an upper surface and a lower surface opposite to each other;
a plurality of sub-plates disposed on the upper surface of the base plate, and
extending in the first direction, and spaced apart from each other in the second direction; and
a plurality of cameras disposed on the plurality of sub-plates on the upper surface of the base plate,
the plurality of sub-plates are movable along the base plate in the second direction,
the plurality of cameras are movable along the plurality of sub-plates in the first direction, and
a distance between the plurality of camera modules varies in the first and second directions by the plurality of sub-plates.
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