US 12,089,498 B2
Method for manufacturing vibrator, vibrator, and vibrator device
Seiichiro Ogura, Minowa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Jun. 29, 2021, as Appl. No. 17/361,478.
Claims priority of application No. 2020-112534 (JP), filed on Jun. 30, 2020.
Prior Publication US 2021/0408365 A1, Dec. 30, 2021
Int. Cl. H01L 41/22 (2013.01); H10N 30/01 (2023.01); H10N 30/20 (2023.01); H10N 30/87 (2023.01)
CPC H10N 30/01 (2023.02) [H10N 30/20 (2023.02); H10N 30/87 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A vibrator, comprising:
a base portion;
a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and
a weight film disposed at the first main surface of the weight portion, wherein
the first main surface includes a first planar surface, a second planar surface which is located closer to the second main surface than is the first planar surface and which is parallel to the first planar surface, and an inclined surface which couples the first planar surface and the second planar surface and which forms an angle of 100° or less with the first planar surface, and
a part of the weight film is removed to form a processing mark recessed in a thickness direction of the vibrating arm.