US 12,089,374 B2
MEMS-based active cooling systems
Prabhu Sathyamurthy, San Jose, CA (US); Suryaprakash Ganti, Los Altos, CA (US); Seshagiri Rao Madhavapeddy, La Jolla, CA (US); Lumaya Ahmed, Sunnyvale, CA (US); and Shekhar Halakatti, Campbell, CA (US)
Assigned to Frore Systems Inc., San Jose, CA (US)
Filed by Frore Systems Inc., San Jose, CA (US)
Filed on Feb. 28, 2022, as Appl. No. 17/683,228.
Application 17/683,228 is a continuation in part of application No. 17/154,970, filed on Jan. 21, 2021, granted, now 11,735,496.
Application 17/683,228 is a continuation in part of application No. 16/915,912, filed on Jun. 29, 2020, granted, now 11,464,140.
Application 17/154,970 is a continuation of application No. 16/369,766, filed on Mar. 29, 2019, granted, now 10,943,850, issued on Mar. 9, 2021.
Claims priority of provisional application 63/277,494, filed on Nov. 9, 2021.
Claims priority of provisional application 63/220,371, filed on Jul. 9, 2021.
Claims priority of provisional application 63/155,721, filed on Mar. 2, 2021.
Claims priority of provisional application 62/945,001, filed on Dec. 6, 2019.
Claims priority of provisional application 62/717,474, filed on Aug. 10, 2018.
Prior Publication US 2022/0189852 A1, Jun. 16, 2022
Int. Cl. H05K 7/20 (2006.01); B06B 1/06 (2006.01); F04B 43/04 (2006.01); H01L 23/427 (2006.01); H01L 23/433 (2006.01); H01L 23/46 (2006.01); H10N 30/20 (2023.01)
CPC H05K 7/2039 (2013.01) [B06B 1/06 (2013.01); H01L 23/427 (2013.01); H01L 23/433 (2013.01); H10N 30/20 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A cooling system, comprising:
a first heat spreader and a second heat spreader thermally coupled with a heat-generating structure, wherein the first heat spreader and the second heat spreader are thermally connected to the heat-generating structure in series, wherein the first heat spreader and the second heat spreader constitute a heat spreading structure;
a cooling element in fluid communication with the first heat spreader and the second heat spreader, the heat-generating structure being offset from the cooling element; and
an orifice plate having at least one orifice therein, the orifice plate being disposed between the cooling element and the heat-generating structure, the cooling element being actuated to drive a fluid through the at least one orifice, wherein the cooling element is not in direct contact with the orifice plate;
wherein one heat spreader of the first heat spreader and the second heat spreader is vertically offset with respect to the heat-generating structure in a cross-sectional view;
wherein the one heat spreader is thermally connected to the heat-generating structure via a thermal interface material or another heat conductor;
wherein the cooling element is located on one side of the heat spreading structure;
wherein the heat-generating structure is located on another side of the heat spreading structure; and
wherein the cooling element undergoes vibrational motion when actuated to drive the fluid toward the first heat spreader and the second heat spreader.