US 12,088,277 B2
Vibration device and oscillator
Ryuta Nishizawa, Nagano (JP); Atsushi Matsuo, Shiojiri (JP); Keiichi Yamaguchi, Ina (JP); and Taku Matsunaga, Minowa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Toyko (JP)
Filed on May 18, 2021, as Appl. No. 17/322,948.
Claims priority of application No. 2020-087260 (JP), filed on May 19, 2020.
Prior Publication US 2021/0367583 A1, Nov. 25, 2021
Int. Cl. H03H 9/19 (2006.01); G01K 7/32 (2006.01); H03B 5/32 (2006.01)
CPC H03H 9/19 (2013.01) [G01K 7/32 (2013.01); H03B 5/32 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A vibration device comprising:
a quartz substrate including a first vibration section, a second vibration section, and a third vibration section;
a pair of first excitation electrodes formed at two principal surfaces of the quartz substrate in the first vibration section;
a pair of second excitation electrodes so formed in the second vibration section as to sandwich the second vibration section in a thickness direction of the quartz substrate; and
a pair of third excitation electrodes so formed in the third vibration section as to sandwich the third vibration section in the thickness direction of the quartz substrate,
wherein at least one of the pair of second excitation electrodes is formed at a first inclining surface that inclines with respect to the two principal surfaces,
at least one of the pair of third excitation electrodes is formed at a second inclining surface that inclines with respect to the two principal surfaces, and
the second inclining surface inclines with respect to the first inclining surface.