CPC H01L 33/24 (2013.01) [H01L 25/0753 (2013.01); H01L 33/0095 (2013.01); H01L 33/16 (2013.01); H01L 33/32 (2013.01)] | 7 Claims |
1. A method of manufacturing a light emitting device, comprising:
preparing a patterned substrate, which includes a substrate, a polycrystalline layer on the substrate, and a seed pattern protruding above the polycrystalline layer; and
performing a metal organic chemical vapor deposition process on the patterned substrate to form a light emitting device and an epitaxial layer on the seed pattern and the polycrystalline layer, respectively,
wherein a growth rate of the light emitting device on the seed pattern is higher than a growth rate of the epitaxial layer on the polycrystalline layer, during the metal organic chemical vapor deposition process.
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