	US 12,087,810 B2
	Capacitor and electronic device including the same
Jinhong Kim, Seoul (KR); Changsoo Lee, Seoul (KR); Yongsung Kim, Suwon-si (KR); Euncheol Do, Seoul (KR); Jooho Lee, Hwaseong-si (KR); and Yong-Hee Cho, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Apr. 7, 2022, as Appl. No. 17/715,389.
Claims priority of application No. 10-2021-0122774 (KR), filed on Sep. 14, 2021.
Prior Publication US 2023/0080072 A1, Mar. 16, 2023
Int. Cl. H10B 12/00 (2023.01); H01L 49/02 (2006.01)

CPC H01L 28/65 (2013.01) [H01L 28/75 (2013.01); H10B 12/30 (2023.02)]

23 Claims

1. A capacitor comprising:

a lower electrode;

an upper electrode apart from the lower electrode; and

a dielectric between the lower electrode and the upper electrode, the dielectric comprising a dielectric layer including TiO₂, and a leakage current reducing layer including GeO₂in the dielectric layer such that the TiO₂is above and below the leakage current reducing layer,

wherein the leakage current reducing layer has at least one of a rutile phase or an amorphous phase.