US 12,087,797 B2
Image sensor structure
Xiuyu Cai, San Diego, CA (US); Ali Agah, Menlo Park, CA (US); Tracy H. Fung, Redwood City, CA (US); and Dietrich Dehlinger, San Francisco, CA (US)
Assigned to ILLUMINA, INC., San Diego, CA (US)
Filed by Illumina, Inc., San Diego, CA (US)
Filed on Feb. 28, 2023, as Appl. No. 18/175,836.
Application 17/119,909 is a division of application No. 16/208,862, filed on Dec. 4, 2018, granted, now 10,879,296, issued on Dec. 29, 2020.
Application 18/175,836 is a continuation of application No. 17/119,909, filed on Dec. 11, 2020, granted, now 11,610,928.
Claims priority of provisional application 62/610,354, filed on Dec. 26, 2017.
Claims priority of application No. 2020615 (NL), filed on Mar. 19, 2018.
Prior Publication US 2023/0207601 A1, Jun. 29, 2023
Int. Cl. H01L 27/146 (2006.01); G01J 1/02 (2006.01); G01J 1/44 (2006.01); G01N 21/05 (2006.01); G01N 21/64 (2006.01)
CPC H01L 27/14636 (2013.01) [G01J 1/0209 (2013.01); G01J 1/0214 (2013.01); G01J 1/44 (2013.01); G01N 21/6454 (2013.01); H01L 27/14601 (2013.01); H01L 27/14609 (2013.01); H01L 27/1462 (2013.01); H01L 27/14625 (2013.01); H01L 27/14629 (2013.01); H01L 27/14643 (2013.01); G01N 21/05 (2013.01); G01N 2201/0642 (2013.01); H01L 27/14623 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An image sensor structure, comprising:
an image layer comprising an array of light detectors disposed therein;
a device stack disposed over the image layer;
an array of light guides disposed in the device stack, each light guide associated with at least one light detector of the array of light detectors;
a passivation stack disposed over the device stack;
a crosstalk blocking metal structure disposed in the passivation stack, wherein the crosstalk blocking metal structure extends from at least a top surface of a layer and through at least a portion of the layer in the passivation stack, wherein the crosstalk blocking metal structure reduces crosstalk within the passivation stack.