US 12,087,645 B2
Method of inspecting display device and method of manufacturing display device
Seung Kyu Lee, Cheonan-si (KR); and Ki Pyo Hong, Hwaseong-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Aug. 18, 2021, as Appl. No. 17/445,378.
Claims priority of application No. 10-2020-0150123 (KR), filed on Nov. 11, 2020.
Prior Publication US 2022/0148926 A1, May 12, 2022
Int. Cl. H01L 21/66 (2006.01); G01R 31/26 (2020.01); G01R 31/54 (2020.01); H01L 25/16 (2023.01)
CPC H01L 22/14 (2013.01) [G01R 31/2635 (2013.01); G01R 31/54 (2020.01); H01L 25/167 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of inspecting a display device comprising a substrate, a light emitting element on the substrate, a first contact electrode on one end of the light emitting element, and a second contact electrode spaced from the first contact electrode and on an other end of the light emitting element, the method comprising:
applying a first inspection voltage and a second inspection voltage to the first contact electrode and the second contact electrode, respectively, and measuring a first inspection current; and
while applying the first inspection voltage and the second inspection voltage to the first contact electrode and the second contact electrode, respectively, irradiating the light emitting element with inspection light and measuring a second inspection current, and
determining a contact failure between the light emitting element and the first contact electrode or the second contact electrode based on the first inspection current and the second inspection current.