US 12,087,615 B2
Method for manufacturing a film on a support having a non-flat surface
Bruno Ghyselen, Seyssinet (FR); and Jean-Marc Bethoux, La Buisse (FR)
Assigned to Soitec, Bernin (FR)
Filed by Soitec, Bernin (FR)
Filed on Jun. 6, 2022, as Appl. No. 17/805,614.
Application 17/805,614 is a continuation of application No. 16/759,990, granted, now 11,373,897, previously published as PCT/EP2018/079797, filed on Oct. 31, 2018.
Claims priority of application No. 1760270 (FR), filed on Oct. 31, 2017.
Prior Publication US 2022/0301923 A1, Sep. 22, 2022
Int. Cl. H01L 21/762 (2006.01); H10N 30/073 (2023.01)
CPC H01L 21/76254 (2013.01) [H10N 30/073 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A structure, comprising:
a donor substrate including an embrittlement zone delimiting a superficial film, wherein the embrittlement zone is free of bubbles; and
a support covering the superficial film,
wherein the superficial film comprises a first surface adjacent the support and a second surface opposite the support,
wherein the first surface of the superficial film adjacent the support comprises a predefined geometry comprising recessed patterns.