US 12,087,612 B2
Micro device structure and display apparatus
Ming-Hsien Wu, Hsinchu County (TW); Wei-Hung Kuo, Hsinchu (TW); Chu-Li Chao, Hsinchu (TW); Chu-Yin Hung, Hsinchu (TW); and Yu-Hsiang Chang, Hsinchu County (TW)
Assigned to Industrial Technology Research Institute, Hsinchu (TW)
Filed by Industrial Technology Research Institute, Hsinchu (TW)
Filed on Sep. 22, 2021, as Appl. No. 17/482,409.
Claims priority of application No. 110116846 (TW), filed on May 11, 2021.
Prior Publication US 2022/0367230 A1, Nov. 17, 2022
Int. Cl. H01L 21/683 (2006.01); H01L 25/075 (2006.01); H01L 33/62 (2010.01)
CPC H01L 21/6835 (2013.01) [H01L 25/0753 (2013.01); H01L 33/62 (2013.01); H01L 2221/68354 (2013.01); H01L 2221/68368 (2013.01); H01L 2933/0066 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A micro device structure, comprising:
a device, having an upper surface, a lower surface, and a first side surface, wherein the lower surface is opposite to the upper surface, and the first side surface connects the upper surface and the lower surface; and
a fixed structure, comprising a connecting portion and a first turning portion, wherein the connecting portion extends at least from the upper surface of the device to the first side surface, and the first turning portion is in contact with a first tip of the connecting portion and extends outward from the first side surface to be away from the first side surface, wherein the first tip of the connecting portion is located on the first side surface between the upper surface and the lower surface, and the device comprises:
at least one electrode, located on the lower surface of the device,
wherein a tip of the first turning portion away from the first side surface is suspended.