| CPC H01L 21/67396 (2013.01) [H01L 21/67389 (2013.01)] | 8 Claims |
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1. An EFEM comprising:
a housing having a substantially closed substrate transfer space in the housing; and
a control part configured to perform a control of supplying an inert gas into at least the housing,
wherein the control part includes:
an inert gas total supply amount setting part configured to set a total supply amount of the inert gas to be supplied into the housing based on an oxygen concentration in the housing;
a door open/purge determination part configured to determine, for each load port adjacent to the housing, whether a container door of a substrate storage container mounted on a mounting table capable of mounting the substrate storage container is in an open state and whether a purge device, which is capable of replacing a gas atmosphere in the substrate storage container mounted on the mounting table with the inert gas, is performing a purge process; and
an in-housing inert gas supply amount calculation part configured to, when a determination result of the door open/purge determination part is “Yes,” calculate a supply amount of the inert gas to be supplied into the housing, based on a value obtained by subtracting an in-container inert gas supply amount, which is a supply amount of the inert gas into the substrate storage container by the purge device of the load port, from the total supply amount of the inert gas, which is set by the inert gas total supply amount setting part, and
wherein the control part is configured to control the supply amount of the inert gas to be supplied into the housing according to an inert gas supply amount command value which is determined based on a calculation result of the in-housing inert gas supply amount calculation part.
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