US 12,087,571 B2
Methods, systems, and apparatus for tape-frame substrate cleaning and drying
Ying Wang, Singapore (SG); Guan Huei See, Singapore (SG); and Gregory J. Wilson, Kalispell, MT (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 25, 2023, as Appl. No. 18/383,617.
Application 18/383,617 is a continuation of application No. 17/569,629, filed on Jan. 6, 2022, granted, now 11,837,464.
Prior Publication US 2024/0071745 A1, Feb. 29, 2024
Int. Cl. H01L 21/02 (2006.01); B08B 3/02 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/02076 (2013.01) [B08B 3/02 (2013.01); H01L 21/67051 (2013.01); H01L 21/6836 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for supporting a tape-frame substrate, the apparatus comprising:
a chuck having a first side and a second side opposite the first side, the first side having a support surface configured to support the tape-frame substrate, the support surface having a central convex portion and an outer concave portion surrounding the central convex portion; and
a plurality of channels extending through the chuck and having outlets along the first side, wherein the plurality of channels are configured to dispense fluid from the outlets along the support surface of the first side.