CPC H01J 49/105 (2013.01) [H01J 49/0027 (2013.01); H01J 49/0463 (2013.01); H05H 1/2406 (2013.01); H05H 1/30 (2013.01)] | 25 Claims |
1. An external ignition device for igniting a plasma in an inductively coupled plasma (ICP) torch, the ignition device comprising:
a circuit comprising:
an oscillator;
a first high voltage transformer coupled to a first electrode; and
a second high voltage transformer coupled to a second electrode;
wherein the ignition device is configured to ignite the plasma by dielectric barrier discharge.
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