US 12,087,546 B2
Variable inductor for plasma generator
Fabio Vicinanza, Sarzens (CH)
Assigned to Advanced Energy Industries, Inc., Denver, CO (US)
Filed by Advanced Energy Industries, Inc., Fort Collins, CO (US)
Filed on Jul. 1, 2021, as Appl. No. 17/365,081.
Prior Publication US 2023/0005719 A1, Jan. 5, 2023
Int. Cl. H02M 7/217 (2006.01); H01F 7/06 (2006.01); H01F 21/08 (2006.01); H01J 37/32 (2006.01)
CPC H01J 37/32174 (2013.01) [H01F 7/064 (2013.01); H01F 21/08 (2013.01); H01J 37/32027 (2013.01); H01J 37/32045 (2013.01); H01J 37/32146 (2013.01); H01J 37/32183 (2013.01); H02M 7/217 (2013.01); H01J 2237/3321 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A system for waveform control, comprising:
a power supply having an input terminal and at least one output terminal, the at least one output terminal configured to be coupled to a load;
a controller;
a variable inductor configured to be coupled to one of the at least one output terminal of the power supply, the variable inductor comprising a first magnetic core, the first magnetic core comprising a plurality of arms, including at least a first inductor arm and a first control arm, wherein an inductance winding having one or more turns is wound around the first inductor arm, and wherein a first control winding comprising one or more turns is wound around the first control arm; and
a DC current source configured to be coupled to the first control arm and the controller, and wherein the controller is configured to adjust a DC bias applied by the DC current source to the first control arm to control an output waveform at the at least one output terminal of the power supply;
wherein the controller is configured to control the DC bias and thereby a shape of the output waveform based on one or more of voltage and current feedback from the power supply, and wherein controlling the DC bias based on the current feedback comprises maintaining a constant or substantially constant relationship between a peak to peak current value and a measured time for waves of the output waveform, wherein the measured time is selected from a group consisting of a rising time, a falling time, and a timespan between a first and a second pre-defined current level.