US 12,085,968 B2
Apparatus for controlling gas flow rates at multi-ports
Kwang Hyo Chung, Daejeon (KR); Chang Geun Ahn, Daejeon (KR); Do Hyun Kim, Daejeon (KR); Seung Hwan Kim, Daejeon (KR); Hyung Wook Noh, Daejeon (KR); Hwin Dol Park, Daejeon (KR); Yong Won Jang, Daejeon (KR); and Jae Hun Choi, Daejeon (KR)
Assigned to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)
Filed by ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)
Filed on Apr. 8, 2022, as Appl. No. 17/716,889.
Claims priority of application No. 10-2021-0172287 (KR), filed on Dec. 3, 2021.
Prior Publication US 2023/0176594 A1, Jun. 8, 2023
Int. Cl. G05D 7/06 (2006.01); F16L 41/00 (2006.01); F16L 41/03 (2006.01)
CPC G05D 7/0664 (2013.01) [F16L 41/008 (2013.01); F16L 41/03 (2013.01)] 6 Claims
OG exemplary drawing
 
6. A multi-port gas flow rate control apparatus comprising:
a gas supply chamber configured to receive a measurement gas through one gas inflow channel and to supply the measurement gas while allowing the measurement gas to diverge into a plurality of flows; and
a gas measurement chamber comprising a lower structure comprising a plurality of accommodation holes configured to accommodate a plurality of gas sensors and an upper structure in which a plurality of hole-shaped gas divergence flow channels configured to connect the gas supply chamber to the accommodation holes of the lower structure so as to allow the measurement gas supplied through the gas supply chamber to diverge and be supplied to the plurality of gas sensors accommodated in the lower structure;
a measurement gas cylinder configured to store the measurement gas and supply the stored measurement gas to the gas measurement chamber;
a pretreatment unit installed between the measurement gas cylinder and the gas supply chamber to concentrate the measurement gas or remove a particular gas component or moisture before measurement;
a purge gas cylinder connected to one side of measurement space and configured to supply a purge gas so as to initialize the measurement space to a state before the measurement;
a suction pump installed on an end of a gas outflow channel and configured to suction a gas for which sensing is completed; and
a valve configured to open or close a gas suction flow channel.