US 12,085,965 B2
Systems, methods, and apparatus for correcting thermal processing of substrates
Wolfgang R. Aderhold, Cupertino, CA (US); Abhilash J. Mayur, Salinas, CA (US); and Yi Wang, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 31, 2021, as Appl. No. 17/463,177.
Prior Publication US 2023/0069444 A1, Mar. 2, 2023
Int. Cl. H01L 21/324 (2006.01); G01J 5/34 (2022.01); G05B 13/02 (2006.01); G05D 23/19 (2006.01); G05D 23/27 (2006.01); G06N 20/00 (2019.01); H01L 21/66 (2006.01); H05B 1/02 (2006.01); F27B 17/00 (2006.01); H05B 3/00 (2006.01)
CPC G05D 23/1917 (2013.01) [G01J 5/34 (2013.01); G05B 13/0265 (2013.01); G05D 23/27 (2013.01); G06N 20/00 (2019.01); H01L 22/12 (2013.01); H05B 1/0233 (2013.01); F27B 17/0025 (2013.01); H05B 3/0047 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system for processing substrates, comprising:
a chamber comprising an internal volume;
a substrate support;
a plurality of heat lamps;
one or more radiation detectors disposed on an opposing side of the substrate support relative to the plurality of heat lamps; and
a controller comprising instructions that, when executed, cause a plurality of operations to be conducted, the plurality of operations comprising:
heating a substrate across a plurality of temperatures using the plurality of heat lamps, the heating comprising directing an incident radiation to a receiving surface of the substrate across a plurality of wavelengths for each temperature of the plurality of temperatures,
detecting a plurality of transmitted radiation values transmitted from a transmitting surface of the substrate across the plurality of wavelengths for each temperature of the plurality of temperatures,
determining a plurality of absorptive factors across the plurality of wavelengths for each temperature of the plurality of temperatures,
determining a plurality of absorbed power values across the plurality of wavelengths for each temperature of the plurality of temperatures;
generating an absorbed power curve across the plurality of wavelengths for each temperature of the plurality of temperatures,
generating a corrective absorption factor curve comprising a plurality of corrective absorption factors,
identifying a classification of the substrate, and
transforming the corrective absorption factor curve, the transforming comprising:
comparing the corrective absorption factor curve with a stored corrective factor curve comprising a plurality of stored corrective factors, and
merging the corrective absorption factor curve with the stored corrective factor curve to generate a transformed corrective factor curve.