US 12,085,953 B2
Installation and relocation of mobile stocker
Rong Syuan Fan, Taoyuan (TW); Ching-Jung Chang, Taichung (TW); Chi-Feng Tung, Jhunan Township (TW); and Hsiang Yin Shen, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jun. 28, 2021, as Appl. No. 17/304,912.
Claims priority of provisional application 63/201,318, filed on Apr. 23, 2021.
Prior Publication US 2022/0344187 A1, Oct. 27, 2022
Int. Cl. G05D 1/00 (2024.01); G06Q 10/087 (2023.01); B65G 1/137 (2006.01)
CPC G05D 1/0278 (2013.01) [G06Q 10/087 (2013.01); B65G 1/1371 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mobile stocker, comprising:
a storage unit configured to store a plurality of transport carriers,
wherein the storage unit includes at least one of:
a plurality of rows configured to store respective subsets of the plurality of transport carriers, or
a plurality of columns configured to store respective subsets of the plurality of transport carriers;
a plurality of wheels, at a bottom of the storage unit, configured to permit the mobile stocker to be moved in a semiconductor fabrication facility;
one or more anchors configured to attach or secure to holes in, or latches on, a floor of the semiconductor fabrication facility; and
a navigation system configured to autonomously navigate the mobile stocker in the semiconductor fabrication facility.