CPC G05D 1/0278 (2013.01) [G06Q 10/087 (2013.01); B65G 1/1371 (2013.01)] | 20 Claims |
1. A mobile stocker, comprising:
a storage unit configured to store a plurality of transport carriers,
wherein the storage unit includes at least one of:
a plurality of rows configured to store respective subsets of the plurality of transport carriers, or
a plurality of columns configured to store respective subsets of the plurality of transport carriers;
a plurality of wheels, at a bottom of the storage unit, configured to permit the mobile stocker to be moved in a semiconductor fabrication facility;
one or more anchors configured to attach or secure to holes in, or latches on, a floor of the semiconductor fabrication facility; and
a navigation system configured to autonomously navigate the mobile stocker in the semiconductor fabrication facility.
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