US 12,085,851 B2
Pressure sensor manifold with increased photocurable resistance
John D. Williamson, Thorndale, TX (US); and Steven C. Shackleton, Austin, TX (US)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 28, 2020, as Appl. No. 17/035,331.
Prior Publication US 2022/0100083 A1, Mar. 31, 2022
Int. Cl. G01L 9/00 (2006.01); G01L 19/00 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01)
CPC G03F 7/0002 (2013.01) [G01L 9/0041 (2013.01); G01L 19/0007 (2013.01); H01L 21/0271 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A pressure sensor manifold, comprising:
a fluid inlet having a first interior cross-section;
a fluid outlet having a second interior cross-section; and
a dome-shape cavity having an apex, wherein the fluid inlet and the fluid outlet connect with the cavity and wherein a line that is tangential to the apex passes through a plurality of points on both the first interior cross-section of the fluid inlet and the second interior cross-section of the fluid outlet.