US 12,085,780 B2
Optical system, heating arrangement, and method for heating an optical element in an optical system
Andrea Berner, Jena (DE); Susanne Beder, Aalen (DE); André Dirauf, Aalen (DE); Hans-Michael Stiepan, Aalen (DE); and Peter Klopfleisch, Jena (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Jun. 7, 2022, as Appl. No. 17/805,757.
Application 17/805,757 is a continuation of application No. PCT/EP2020/073207, filed on Aug. 19, 2020.
Claims priority of application No. 102019219289.0 (DE), filed on Dec. 11, 2019.
Prior Publication US 2022/0299732 A1, Sep. 22, 2022
Int. Cl. G02B 7/18 (2021.01); G02B 6/10 (2006.01); G02B 6/26 (2006.01); G02B 17/08 (2006.01); G03F 7/00 (2006.01); H05B 3/84 (2006.01); G02B 23/02 (2006.01); G02B 27/09 (2006.01)
CPC G02B 7/1815 (2013.01) [G02B 6/102 (2013.01); G02B 6/262 (2013.01); G02B 17/0832 (2013.01); G03F 7/70891 (2013.01); H05B 3/84 (2013.01); G02B 23/02 (2013.01); G02B 27/0944 (2013.01); G02B 27/095 (2013.01); H05B 2203/032 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical system, comprising:
a mirror comprising an optically effective surface configured to operate at an operating wavelength of less than 30 nm;
a plurality of IR emitters configured to emit IR radiation;
a plurality of optical fibers;
a multi-fiber connector; and
a beam shaping unit,
wherein:
for each IR emitter, the IR emitter has a corresponding optical fiber so that IR radiation emitted by the IR emitter is coupled into its corresponding optical fiber;
the multi-fiber connector is connected to the optical fibers so that, for each IR emitter, the corresponding optical fiber supplies the IR radiation emitted by the IR emitter to the multi-fiber connector;
the beam shaping unit is configured to shape a beam of the IR radiation emitted by the multi-fiber connector onto the optically effective surface of the mirror; and
for each IR emitter, the IR emitter is activatable and deactivatable independently from the other IR emitters to variably set different heating profiles in the mirror.