US 12,085,744 B1
Superconformal recessed feature fill sol-gels
Alejo Lifschitz Arribio, Redmond, WA (US); Keren Zhang, Woodinville, WA (US); Jonathan Onorato, Seattle, WA (US); Anthony Phan, Redmond, WA (US); and Vincent Overney, Bellevue, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by META PLATFORMS TECHNOLOGIES, LLC
Filed on Jan. 24, 2022, as Appl. No. 17/582,614.
Claims priority of provisional application 63/277,787, filed on Nov. 10, 2021.
Int. Cl. G02B 27/01 (2006.01); C23C 18/12 (2006.01); F21V 8/00 (2006.01)
CPC G02B 6/0036 (2013.01) [C23C 18/1204 (2013.01); C23C 18/1245 (2013.01); C23C 18/1254 (2013.01); G02B 27/0172 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A feature fill sol-gel material for forming a superconformal sol-gel coating, wherein the feature fill sol-gel material comprises a first titanium precursor and a second titanium precursor that is different than the first titanium precursor, wherein the first titanium precursor comprises a titanium oxo mononuclear species and an inorganic ligand,
wherein the feature fill sol-gel material is formed by dissolving or suspending the first titanium precursor in a solvent.