US 12,085,710 B2
Actuator device
Daiki Suzuki, Hamamatsu (JP); Yuki Morinaga, Hamamatsu (JP); and Go Tanaka, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Apr. 24, 2023, as Appl. No. 18/138,266.
Application 18/138,266 is a continuation of application No. 17/512,045, filed on Oct. 27, 2021, granted, now 11,675,185.
Application 17/512,045 is a continuation of application No. 16/631,259, granted, now 11,199,695, issued on Dec. 14, 2021, previously published as PCT/JP2018/023138, filed on Jun. 18, 2018.
Claims priority of application No. 2017-142163 (JP), filed on Jul. 21, 2017.
Prior Publication US 2023/0341676 A1, Oct. 26, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/085 (2013.01) [B81B 3/0075 (2013.01); G02B 26/10 (2013.01); B81B 2201/042 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An actuator device comprising:
a support portion;
a movable portion;
a first connection portion connecting the movable portion to the support portion on a first axis so that the movable portion is swingable around the first axis;
a first wiring provided on the first connection portion; and
a first insulation layer provided on at least the first connection portion,
wherein the first wiring includes a first main body formed of a metal material,
wherein the first insulation layer includes a part provided on the first wiring,
wherein a surface of the part of the first insulation layer on a side opposite to the first connection portion has a shape in which a curvature is continuous over an entirety of the surface in a cross-section perpendicular to an extension direction of the first wiring.