| CPC G01R 31/2867 (2013.01) [H01L 21/6838 (2013.01)] | 7 Claims |
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1. A picker device comprising:
a picker support;
pickers which are arranged in a line on the picker support and each comprising main nozzles to which vacuum pressure is applied to or released from a lower end thereof and a lift actuator supported on the picker support to elevate the main nozzles; and
a sub-nozzle docking module which is docked to or undocked from the main nozzles and comprising:
one or more sub-nozzles configured to adsorb or desorb transfer target objects when vacuum pressure is applied to or released from lower ends thereof;
a docking mount configured to support the sub-nozzles at a lower end portion thereof to receive the vacuum pressure from the main nozzles in a state of being docked to the main nozzles and transmit the vacuum pressure to the sub-nozzles through a vacuum passage; and
an attachment/detachment mechanism configured to attach and detach the docking mount to and from the picker support,
wherein a number of the sub-nozzles is greater than a number of the main nozzles such that an interval between the sub-nozzles is less than an interval between the main nozzles in an arrangement direction of the pickers, and
wherein the vacuum passage of the docking mount is configured to equally transmit the vacuum pressure provided from the main nozzles to the sub-nozzles.
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