US 12,085,589 B2
Fine pitch probe card
Kwame Amponsah, Albany, NY (US); Mehmet Ozdogan, Ithaca, NY (US); and Sirui Tan, Ithaca, NY (US)
Assigned to Xallent Inc., Albany, NY (US)
Appl. No. 17/596,644
Filed by Xallent Inc., Albany, NY (US)
PCT Filed Jun. 16, 2020, PCT No. PCT/US2020/037918
§ 371(c)(1), (2) Date Dec. 15, 2021,
PCT Pub. No. WO2020/257190, PCT Pub. Date Dec. 24, 2020.
Claims priority of provisional application 62/862,163, filed on Jun. 17, 2019.
Prior Publication US 2022/0341968 A1, Oct. 27, 2022
Int. Cl. G01R 1/073 (2006.01); G01R 3/00 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07342 (2013.01) [G01R 3/00 (2013.01); G01R 31/2886 (2013.01); G01R 31/2887 (2013.01); H01L 2924/00 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/0002 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A probe chip, the probe chip comprising:
a substrate;
a plurality of probes made from a conductive material;
a first dielectric layer arranged adjacent to the substrate;
a seed layer arranged between the plurality of probes and the first dielectric layer;
wherein an angled portion of the plurality of probes is at an angle to the top surface of the substrate.