US 12,085,586 B2
Probe element and probe unit
Jun Toda, Nagaokakyo (JP); and Kiyoto Araki, Nagaokakyo (JP)
Assigned to Murata Manufacturing Co., Ltd., Kyoto-fu (JP)
Filed by Murata Manufacturing Co., Ltd., Kyoto-fu (JP)
Filed on Aug. 25, 2021, as Appl. No. 17/412,014.
Application 17/412,014 is a continuation of application No. PCT/JP2020/006967, filed on Feb. 21, 2020.
Claims priority of application No. 2019-034003 (JP), filed on Feb. 27, 2019.
Prior Publication US 2021/0382087 A1, Dec. 9, 2021
Int. Cl. G01R 1/067 (2006.01); H01R 24/44 (2011.01); H01R 103/00 (2006.01)
CPC G01R 1/067 (2013.01) [H01R 24/44 (2013.01); H01R 2103/00 (2013.01); H01R 2201/20 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A probe element, comprising:
a conduction pin having one end configured to couple to a probing object, the conduction pin including
a tip portion including the one end,
a cylindrical socket portion arranged at another end opposite to the one end, and
an intermediate portion coupling the tip portion and the socket portion;
a cylindrical barrel accommodating the conduction pin inside thereof such that the one end is exposed to an outside of the barrel;
a bushing holding the conduction pin inside the barrel in a state in which the one end is movable, and having predetermined permittivity; and
an impedance matching member adjacent to an opposite side of the socket portion from the intermediate portion,
wherein a distance between the socket portion and the barrel and a distance between the intermediate portion and the barrel in a direction orthogonal to an extending direction of the barrel are different from each other.