US 12,085,501 B2
Spectral confocal measurement device and measurement method thereof
Jinfeng Wang, Guangdong (CN); Yuan Luo, Guangdong (CN); Jing He, Jing (CN); and Guanzhong Kou, Guangdong (CN)
Assigned to ALEADER VISION TECHNOLOGY CO., LTD., Dongguan (CN)
Appl. No. 17/753,395
Filed by ALEADER VISION TECHNOLOGY CO., LTD., Guangdong (CN)
PCT Filed Jun. 11, 2020, PCT No. PCT/CN2020/095524
§ 371(c)(1), (2) Date Mar. 1, 2022,
PCT Pub. No. WO2021/248398, PCT Pub. Date Dec. 16, 2021.
Prior Publication US 2023/0087237 A1, Mar. 23, 2023
Int. Cl. G01N 21/31 (2006.01)
CPC G01N 21/31 (2013.01) [G01N 2201/0633 (2013.01); G01N 2201/0635 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A spectral confocal measurement device, comprising:
a light source portion, comprising a light source and a light source controller connected to the light source, and configured to emit a broad-spectrum light beam with a certain wavelength range in a first predetermined path;
an optical sampling portion, comprising a light-incident hole, a dispersive objective lens group and a light-outgoing hole, and configured to converge the broad-spectrum light beam emitted from the light source portion on different measurement surfaces of an object to be measured, and output a reflected light in a second predetermined path that is different from a reverse direction of the first predetermined path; and
a measurement portion, configured to receive and process the reflected light from the optical sampling portion to obtain a measurement result;
wherein the light source is a line light source or a point light source, under controls of the light source controller, the broad spectrum light beam of the line light source is emitted through the light-incident hole, and then into a first side of the dispersive objective lens group and reaches the measurement surface through the first predetermined path; and the second predetermined path follows: the reflected light reflected from the measurement surface is output from a second side of the dispersive objective lens group that is opposite to the first side, and the reflected light as a whole enters the measurement portion through the light-outgoing hole without dividing into more than one part, and the light-outgoing hole and the light-incident hole are the same hole.