US 12,085,481 B2
Seal inspection device and seal inspection method
Yuta Kasai, Fujisawa (JP); Shotaro Karube, Fujisawa (JP); Hikaru Tadano, Fujisawa (JP); Masashi Takekoshi, Fujisawa (JP); and Takayuki Sakurai, Fujisawa (JP)
Assigned to NOK CORPORATION, (JP)
Appl. No. 17/764,569
Filed by NOK CORPORATION, Tokyo (JP)
PCT Filed Aug. 31, 2020, PCT No. PCT/JP2020/032917
§ 371(c)(1), (2) Date Mar. 29, 2022,
PCT Pub. No. WO2021/090563, PCT Pub. Date May 14, 2021.
Claims priority of application No. 2019-200509 (JP), filed on Nov. 5, 2019.
Prior Publication US 2022/0349770 A1, Nov. 3, 2022
Int. Cl. G01M 3/20 (2006.01); H01M 8/0271 (2016.01); H01M 8/04664 (2016.01)
CPC G01M 3/20 (2013.01) [H01M 8/0271 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A seal inspection device comprising:
a first holder including
a port surrounded by an inspection target, and
a through hole connected to an outside-leak detection flow path;
a second holder configured to hold the inspection target between the first and second holders;
an inspection-place sealing portion configured to form, into a closed space, a space where the inspection target is arranged, in cooperation with the first holder and the second holder;
a pressurization valve configured to connect the port to both a supply source of an inspection gas and an exhaust system;
a detector for the inspection gas;
a first measurement valve configured to connect the detector to the port; and
a second measurement valve configured to connect the outside-leak detection flow path to the detector.