US 12,085,460 B2
Resonator device for measuring stress including at least two resonators with shared cavity
Sylvain Ballandras, Besançon (FR); Emilie Courjon, Besançon (FR); Florent Bernard, Besançon (FR); and Alexandre Raveski, Besançon (FR)
Assigned to SOITEC, Bernin (FR)
Appl. No. 17/599,896
Filed by Soitec, Bernin (FR)
PCT Filed Mar. 19, 2020, PCT No. PCT/EP2020/057616
§ 371(c)(1), (2) Date Sep. 29, 2021,
PCT Pub. No. WO2020/200810, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 1903408 (FR), filed on Mar. 29, 2019.
Prior Publication US 2022/0196490 A1, Jun. 23, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01L 1/16 (2006.01)
CPC G01L 1/165 (2013.01) 20 Claims
OG exemplary drawing
 
1. A resonator device for measuring stress, comprising:
at least two resonators, each resonator comprising an inter-digitated transducer structure arranged between two reflecting structures on or in a piezoelectric substrate;
wherein the at least two resonators are arranged and positioned such that they have two different wave propagation directions;
wherein each resonator comprises at least two parts with an area between the two parts of the at least two resonators forming a cavity, wherein the cavity is shared by the at least two resonators; and
wherein each of the at least two parts of the at least two resonators comprises at least one reflecting structure and a part of the inter-digitated transducer structure of the corresponding resonator.