US 12,085,450 B2
Deposition apparatus and method for inspecting nozzle using the same
Su Hwan Lee, Asan-si (KR); Young Bae Kee, Cheonan-si (KR); Min Woo Kim, Asan-si (KR); Un Cheol Sung, Cheonan-si (KR); Byoung Gu An, Asan-si (KR); and Jae Soo Ha, Asan-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Dec. 3, 2020, as Appl. No. 17/111,258.
Claims priority of application No. 10-2020-0027630 (KR), filed on Mar. 5, 2020.
Prior Publication US 2021/0278280 A1, Sep. 9, 2021
Int. Cl. G01J 5/00 (2022.01); B05B 15/52 (2018.01); G01J 5/52 (2022.01); G01J 5/60 (2006.01)
CPC G01J 5/0037 (2013.01) [B05B 15/52 (2018.02); G01J 5/52 (2013.01); G01J 5/60 (2013.01); G01J 2005/0077 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for inspecting a first nozzle and a second nozzle, comprising: measuring, by a temperature measurement unit, a temperature of the first nozzle and the second nozzle; receiving, by a controller, temperature measurement data corresponding to the temperature of the first nozzle and the second nozzle; comparing, by the controller, the temperature of the first nozzle with a reference temperature; determining, by the controller, the first nozzle is clogged based on the temperature of the first nozzle; and transmitting, by the controller, a control signal to a repair unit, based on the temperature of the first nozzle, to control an operation of repairing the first nozzle.