US 12,085,338 B2
Heater, temperature control system, and processing apparatus
Tetsuya Kosugi, Toyama (JP); Masaaki Ueno, Toyama (JP); Shinobu Sugiura, Toyama (JP); and Masashi Sugishita, Toyama (JP)
Assigned to KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed by KOKUSAI ELECTRIC CORPORATION, Tokyo (JP)
Filed on Jun. 11, 2020, as Appl. No. 16/899,041.
Claims priority of application No. 2019-109838 (JP), filed on Jun. 12, 2019; and application No. 2020-073076 (JP), filed on Apr. 15, 2020.
Prior Publication US 2020/0393197 A1, Dec. 17, 2020
Int. Cl. F27B 17/00 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01); H05B 3/00 (2006.01)
CPC F27B 17/0025 (2013.01) [H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05B 1/0233 (2013.01); H05B 3/0019 (2013.01); H05B 3/0047 (2013.01); H05B 2203/035 (2013.01); H05B 2203/037 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A heater divided into a plurality of control zones, the heater comprising:
an output circuit installed for each of the control zones; and
a plurality of heat generators installed for each of the control zones and configured to raise an internal temperature of a reaction tube by heat generation,
wherein the output circuit installed for a control zone, which is located in a wafer region, among the control zones:
includes a parallel circuit in which the plurality of heat generators are wired in parallel; and
is configured to be capable of adjusting a power outputted from at least one of the plurality of the heat generators by connecting an output variable element to the at least one of the plurality of the heat generators to thereby adjust a power supplied to the at least one of the plurality of the heat generators, and
wherein the output variable element is configured to adjust the power supplied to the at least one of the plurality of heat generators based on a control signal inputted to the output variable element.