US 12,085,124 B2
Bearing assembly for accommodating device for semiconductor apparatus
Bin Hua, Suzhou (CN); Xianmiao Sun, Suzhou (CN); Xinyu Shi, Suzhou (CN); and Wenxuan Li, Suzhou (CN)
Assigned to ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD., Suzhou (CN)
Appl. No. 17/918,223
Filed by ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD., Suzhou (CN)
PCT Filed Aug. 9, 2022, PCT No. PCT/CN2022/111084
§ 371(c)(1), (2) Date Oct. 11, 2022,
PCT Pub. No. WO2023/045596, PCT Pub. Date Mar. 30, 2023.
Claims priority of application No. 202111132436.2 (CN), filed on Sep. 27, 2021.
Prior Publication US 2024/0209893 A1, Jun. 27, 2024
Int. Cl. H01L 21/67 (2006.01); F16C 19/36 (2006.01); H01L 21/673 (2006.01)
CPC F16C 19/36 (2013.01) [H01L 21/67057 (2013.01); H01L 21/67326 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A bearing assembly for a semiconductor apparatus containment device, used for bearing the semiconductor apparatus containment device, and
comprising: a bearing cantilever, a supporting assembly connected to the bearing cantilever and a first drive device, wherein
the bearing cantilever comprises: a bearing portion for bearing the semiconductor apparatus containment device, a connecting plate and a substrate, the bearing portion being composed of a bearing plate and a bearing support, the bearing plate is horizontally inserted into the bearing support, an opening for exposing a semiconductor apparatus being formed at a bottom of the semiconductor apparatus containment device, the bearing plate being provided with a rotatable rotating roller located below the opening, the rotating roller making contact with an edge of the semiconductor apparatus, and the first drive device driving the rotating roller to rotate by means of a power transmission member, so as to apply a rotating force by means of the rotating roller, to an edge of the semiconductor apparatus inserted into the semiconductor apparatus containment device; and
a bottom of the connecting plate is provided with several positioning stepped holes continuously provided, a positioning seat for limiting longitudinal displacement of the rotating roller is arranged at a tail end of the bearing plate away from the connecting plate, a first rolling member embedded into the positioning stepped holes is arranged at an end of the rotating roller close to the connecting plate, the rotating roller is longitudinally clamped by the positioning seat and the connecting plate, and the positioning stepped holes are distributed in an arc shape.