US 12,085,085 B2
Vacuum pump system and control method
Shingo Tanaka, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Filed by SHIMADZU CORPORATION, Kyoto (JP)
Filed on Apr. 28, 2023, as Appl. No. 18/140,929.
Claims priority of application No. 2022-102207 (JP), filed on Jun. 24, 2022.
Prior Publication US 2023/0417254 A1, Dec. 28, 2023
Int. Cl. F04D 27/00 (2006.01); F04D 19/04 (2006.01); F04D 27/02 (2006.01)
CPC F04D 27/008 (2013.01) [F04D 27/001 (2013.01); F04D 27/0292 (2013.01); F04D 19/042 (2013.01); F04D 19/048 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A vacuum pump system including a vacuum pump configured to pump gas by drive of a rotor by a motor, comprising:
a storage storing a first threshold for a number of times of occurrence of an abnormality for outputting an alarm;
a controller configured to count the number of times of occurrence of the abnormality occurred in the vacuum pump, determine whether or not the number of times of occurrence of the abnormality is the first threshold or more, and output the alarm in a case where the number of times of occurrence of the abnormality is the first threshold or more; and
a setter configured to set or change the first threshold on a basis of an operation state of the vacuum pump,
wherein
the setter
predicts, on a basis of the number of times of occurrence of the abnormality in a case where an operation time of the vacuum pump reaches a first time, the number of times of occurrence of the abnormality in a case where the operation time of the vacuum pump reaches a second time longer than the first time as a predicted number of times of occurrence, and
sets or changes the first threshold on the basis of the predicted number of times of occurrence.