US 12,085,067 B2
Valve module, fluid control apparatus, and electronic apparatus
Hiroto Kawaguchi, Tokyo (JP); Hiroshi Suzuki, Tokyo (JP); Yuya Horiuchi, Tokyo (JP); Takuma Matsushita, Tokyo (JP); and Daisuke Mizuta, Tokyo (JP)
Assigned to SONY GROUP CORPORATION, Tokyo (JP)
Appl. No. 17/755,546
Filed by SONY GROUP CORPORATION, Tokyo (JP)
PCT Filed Oct. 27, 2020, PCT No. PCT/JP2020/040175
§ 371(c)(1), (2) Date May 2, 2022,
PCT Pub. No. WO2021/090729, PCT Pub. Date May 14, 2021.
Claims priority of application No. 2019-203225 (JP), filed on Nov. 8, 2019.
Prior Publication US 2022/0372965 A1, Nov. 24, 2022
Int. Cl. F04B 43/04 (2006.01); F04B 49/22 (2006.01)
CPC F04B 43/04 (2013.01) [F04B 49/22 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A valve module, comprising:
a movable member that includes a film elastically deformable by a fluid, wherein
the movable member has a first surface on a side of a member plate that has an opening through which the fluid passes,
the movable member has a second surface on a side opposite to the first surface,
the opening has a length of 1 mm to 2 mm in a y-axis direction,
the opening has a length of 0.1 mm to 0.5 mm in an x-axis direction, and
the x-axis direction is perpendicular to the y-axis direction and is in a common plane with the y-axis direction;
a support member that has higher rigidity than a rigidity of the movable member, wherein
the support member covers a part of a region of the second surface in which the opening is not located as viewed in a direction perpendicular to the second surface, and
the support member is fixed to the member plate;
an overlapping region in which the movable member overlaps with the support member; and
a non-overlapping region includes a first non-overlapping region and a second non-overlapping region, wherein
the movable member is in the first non-overlapping region and the second non-overlapping region, and
the overlapping region is between the first non-overlapping region and the second non-overlapping region.