US 12,084,777 B2
Method for manufacturing hard carbon-based coating, and member provided with coating
Yoshiki Nishibayashi, Osaka (JP); Shigeki Maeda, Higashiosaka (JP); and Kazutaka Fujiwara, Naka (JP)
Assigned to Sumitomo Electric industries, Ltd., Osaka (JP); MITSUBISHI MATERIALS CORPORATION, Tokyo (JP); and D.N.A. METAL COMPANY, LIMITED, Osaka (JP)
Appl. No. 16/650,128
Filed by Sumitomo Electric Industries, Ltd., Osaka (JP); MITSUBISHI MATERIALS CORPORATION, Tokyo (JP); and D.N.A. METAL COMPANY, LIMITED, Ibaraki (JP)
PCT Filed Sep. 11, 2018, PCT No. PCT/JP2018/033715
§ 371(c)(1), (2) Date Mar. 24, 2020,
PCT Pub. No. WO2019/059054, PCT Pub. Date Mar. 28, 2019.
Claims priority of application No. 2017-184240 (JP), filed on Sep. 25, 2017; and application No. 2018-044133 (JP), filed on Mar. 12, 2018.
Prior Publication US 2021/0156033 A1, May 27, 2021
Int. Cl. C23C 14/00 (2006.01); C23C 26/00 (2006.01)
CPC C23C 26/00 (2013.01) 3 Claims
OG exemplary drawing
 
1. A method for manufacturing a hard carbon-based coating, the method comprising:
a step A of preparing a film-forming apparatus including a power supply device and a discharge electrode containing a carbon material, and a substrate having a surface on which a coating is to be formed;
a step B of causing the film-forming apparatus to repeatedly generate a discharge between the discharge electrode and the substrate, to form the hard carbon-based coating consisting of an electrode material of the discharge electrode on the surface,
wherein the discharge electrode is vibrated to generate a periodic discharge;
the power supply device is an AC power source; and
an AC voltage applied to the discharge electrode is greater than or equal to 7.5 kV at a frequency of 50 Hz to 60 Hz, the discharge electrode being vibrated at 30 Hz to 90 Hz, and the discharge electrode being rubbed against the surface of the substrate to cause the discharge electrode to scan the surface of the substate.