US 12,084,761 B2
Multi-depth film for optical devices
Karl J. Armstrong, Sunnyvale, CA (US); Ludovic Godet, Sunnyvale, CA (US); Brian Alexander Cohen, Delmar, NY (US); Wayne McMillan, San Jose, CA (US); James D. Strassner, Austin, TX (US); and Benjamin B. Riordon, Newburyport, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Feb. 17, 2023, as Appl. No. 18/111,385.
Application 18/111,385 is a division of application No. 16/843,347, filed on Apr. 8, 2020, granted, now 11,608,558.
Claims priority of provisional application 62/832,752, filed on Apr. 11, 2019.
Prior Publication US 2023/0203647 A1, Jun. 29, 2023
Int. Cl. H01L 21/677 (2006.01); C23C 14/04 (2006.01); C23C 14/06 (2006.01); C23C 14/08 (2006.01); C23C 14/14 (2006.01); C23C 16/04 (2006.01); C23C 16/24 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/56 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01); G02B 6/132 (2006.01)
CPC C23C 16/405 (2013.01) [C23C 14/042 (2013.01); C23C 14/0652 (2013.01); C23C 14/083 (2013.01); C23C 14/086 (2013.01); C23C 14/14 (2013.01); C23C 16/042 (2013.01); C23C 16/24 (2013.01); C23C 16/345 (2013.01); C23C 16/407 (2013.01); C23C 16/45525 (2013.01); C23C 16/56 (2013.01); H01L 21/67766 (2013.01); H01L 21/67778 (2013.01); H01L 21/682 (2013.01); H01L 21/6838 (2013.01); G02B 6/132 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method, comprising:
inserting a carrier having a mask thereon into an alignment station;
aligning the carrier and the mask;
separating the mask from the carrier;
removing the carrier from the alignment station;
inserting a substrate into the alignment station;
contacting the substrate to the mask; and
contacting the carrier to the substrate and mask to create a carrier assembly.