US 12,084,464 B2
Rhenium complexes and methods of use
Thomas Knisley, Livonia, MI (US); Keenan N. Woods, San Ramon, CA (US); Mark Saly, Santa Clara, CA (US); Charles H. Winter, Bloomfield Hills, MI (US); and Stefan Cwik, Braintree, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US); and Wayne State University, Detroit, MI (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US); and Wayne State University, Detroit, MI (US)
Filed on Nov. 20, 2020, as Appl. No. 17/100,292.
Claims priority of provisional application 62/939,321, filed on Nov. 22, 2019.
Prior Publication US 2021/0155646 A1, May 27, 2021
Int. Cl. C07F 13/00 (2006.01); C23C 16/06 (2006.01); C23C 16/455 (2006.01)
CPC C07F 13/005 (2013.01) [C23C 16/06 (2013.01); C23C 16/45553 (2013.01)] 16 Claims
 
1. A rhenium complex having a general formula of O3ReO-M-R1R2R3, wherein:
M is a group IV element selected from silicon, germanium, and tin;
when M is Si then R1 is selected from the group consisting of H, alkyl, and alkoxy, and R2 and R3 are each independently selected from the group consisting of H, alkyl, and alkoxy, or R2 and R3 join together to form a ring structure, or R2 and R3 combine to form an oxo group, and each alkyl is independently selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-butyl, sec-butyl, cyclobutyl, n-pentyl, neopentyl, cyclopentyl n-hexyl, and cyclohexyl, provided that R1, R2 and R3 are not each —CH3 or —C2H5;
when M is Ge then R1 is selected from the group consisting of H, alkyl, and alkoxy, and R2 and R3 are each independently selected from the group consisting of H, alkyl, and alkoxy, or R2 and R3 join together to form a ring structure, or R2 and R3 combine to form an oxo group, provided that R1, R2 and R3 are not each —CH3 or —C2H5; and
when M is Sn then R1 is selected from the group consisting of H, alkyl, alkoxy, and aryl, and R2 and R3 are each independently selected from the group consisting of H, alkyl, alkoxy, and aryl, or R2 and R3 join together to form a ring structure, or R2 and R3 combine to form an oxo group, and each alkyl is independently selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, cyclopropyl, n-pentyl, neopentyl, cyclopentyl n-hexyl, and cyclohexyl, provided that R1, R2 and R3 are not each CH3, —C2H5, or —C6H5.