CPC B41J 2/14129 (2013.01) | 10 Claims |
1. A thermal inkjet printhead, comprising:
a substrate;
a nozzle layer, including a plurality of nozzles formed therethrough;
a plurality of ink ejection chambers corresponding to the plurality of nozzles;
a plurality of heater resistors formed on the substrate and corresponding to the plurality of ink ejection chambers, each of the heater resistors being located in a different one of the ink ejection chambers so that ink drop ejection through each of the nozzles is caused by heating of one of the heater resistors that is located in the corresponding ink ejection chamber;
a plurality of separated cavitation islands formed on and corresponding to the plurality of heater resistors, each of the cavitation islands covering a different one of the heater resistors; and a dielectric layer interposed between the heater resistors and the cavitation islands, wherein the dielectric layer is a composite film made of Silicon nitride and Silicon carbide and having a thickness in the range of about 0.4 to about 0.65 μm, wherein the heater resistors are U-shaped heater resistors.
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