CPC B29C 59/04 (2013.01) [B29C 43/222 (2013.01); B29C 43/28 (2013.01); B29C 43/305 (2013.01); B29C 43/34 (2013.01); B29C 43/48 (2013.01); B29C 43/50 (2013.01); B29C 43/52 (2013.01); B29C 43/58 (2013.01); B29C 51/262 (2013.01); G03F 7/0002 (2013.01); B29C 2043/3433 (2013.01)] | 17 Claims |
1. A double-sided imprinting method comprising:
drawing a first web along first rollers, the first web comprising a first template having a first imprinting feature;
dispensing a first resist on the first template;
waiting until the first resist spreads into the first imprinting feature of the first template;
loading a substrate onto the first template, such that a first side of the substrate is in contact with the first resist on the first template;
clamping the substrate onto the first template, such that the substrate is movable together with the first template;
dispensing a second resist on a second side of the substrate;
aligning a first reference mark on the first web with a second reference mark on a second web that includes a second template, wherein the second template has a second imprinting feature, such that the second imprinting feature is aligned with the first imprinting feature;
after the aligning, drawing the first web along the first rollers and drawing the second web along second rollers simultaneously at a same rate;
curing the first resist and the second resist, such that the cured first resist has a first imprinted feature corresponding to the first imprinting feature on the first side of the substrate and the cured second resist has a second imprinted feature corresponding to the second imprinting feature on the second side of the substrate; and
unloading the substrate with the first imprinted feature on the first side and the second imprinted feature on the second side.
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