US 12,083,733 B2
Double-sided imprinting
Roy Patterson, Hutto, TX (US); Charles Scott Carden, Austin, TX (US); Satish Sadam, Round Rock, TX (US); Ryan Christiansen, Austin, TX (US); Matthew S. Shafran, Fletcher, NC (US); Christopher John Fleckenstein, Round Rock, TX (US); Vikramjit Singh, Pflugerville, TX (US); Michael Nevin Miller, Austin, TX (US); and Kang Luo, Austin, TX (US)
Assigned to Magic Leap, Inc., Plantation, FL (US)
Filed by Magic Leap, Inc., Plantation, FL (US)
Filed on Oct. 6, 2022, as Appl. No. 17/938,550.
Application 17/938,550 is a division of application No. 17/153,774, filed on Jan. 20, 2021, granted, now 11,498,261.
Application 17/153,774 is a division of application No. 15/990,155, filed on May 25, 2018, granted, now 10,926,452, issued on Feb. 23, 2021.
Claims priority of provisional application 62/511,172, filed on May 25, 2017.
Prior Publication US 2023/0036098 A1, Feb. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B29C 59/04 (2006.01); B29C 43/22 (2006.01); B29C 43/28 (2006.01); B29C 43/30 (2006.01); B29C 43/34 (2006.01); B29C 43/48 (2006.01); B29C 43/50 (2006.01); B29C 43/52 (2006.01); B29C 43/58 (2006.01); B29C 51/26 (2006.01); G03F 7/00 (2006.01)
CPC B29C 59/04 (2013.01) [B29C 43/222 (2013.01); B29C 43/28 (2013.01); B29C 43/305 (2013.01); B29C 43/34 (2013.01); B29C 43/48 (2013.01); B29C 43/50 (2013.01); B29C 43/52 (2013.01); B29C 43/58 (2013.01); B29C 51/262 (2013.01); G03F 7/0002 (2013.01); B29C 2043/3433 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A double-sided imprinting method comprising:
drawing a first web along first rollers, the first web comprising a first template having a first imprinting feature;
dispensing a first resist on the first template;
waiting until the first resist spreads into the first imprinting feature of the first template;
loading a substrate onto the first template, such that a first side of the substrate is in contact with the first resist on the first template;
clamping the substrate onto the first template, such that the substrate is movable together with the first template;
dispensing a second resist on a second side of the substrate;
aligning a first reference mark on the first web with a second reference mark on a second web that includes a second template, wherein the second template has a second imprinting feature, such that the second imprinting feature is aligned with the first imprinting feature;
after the aligning, drawing the first web along the first rollers and drawing the second web along second rollers simultaneously at a same rate;
curing the first resist and the second resist, such that the cured first resist has a first imprinted feature corresponding to the first imprinting feature on the first side of the substrate and the cured second resist has a second imprinted feature corresponding to the second imprinting feature on the second side of the substrate; and
unloading the substrate with the first imprinted feature on the first side and the second imprinted feature on the second side.