US 12,083,713 B2
Master, transfer copy, and method for manufacturing master
Yutaka Muramoto, Tochigi (JP); and Masanao Kikuchi, Tochigi (JP)
Assigned to DEXERIALS CORPORATION, Tokyo (JP)
Filed by DEXERIALS CORPORATION, Tochigi (JP)
Filed on Feb. 7, 2023, as Appl. No. 18/106,749.
Application 18/106,749 is a division of application No. 16/332,464, granted, now 11,602,878, previously published as PCT/JP2017/031991, filed on Sep. 5, 2017.
Claims priority of application No. 2016-181844 (JP), filed on Sep. 16, 2016.
Prior Publication US 2023/0182349 A1, Jun. 15, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B29C 33/38 (2006.01); B29C 33/42 (2006.01); B29C 35/08 (2006.01); B29C 59/02 (2006.01); B29C 59/04 (2006.01); B29C 59/16 (2006.01); G03F 7/00 (2006.01)
CPC B29C 33/3878 (2013.01) [B29C 33/424 (2013.01); B29C 59/04 (2013.01); B29C 59/046 (2013.01); B29C 59/16 (2013.01); G03F 7/00 (2013.01); B29C 2035/0827 (2013.01); B29C 2059/023 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A master comprising:
a substrate with a hollow cylindrical shape or cylindrical shape; and
a concave-convex structure on an outer peripheral surface of the substrate,
wherein the concave-convex structure has concavities or convexities continuously arranged in a spiral shape in a circumferential direction of the substrate at a dot pitch equal to or less than a wavelength of a visible light band, and
the concavities or convexities are arranged with a predetermined phase difference between circumferential rows adjacent in an axial direction of the substrate,
wherein the master is made by a method comprising:
a step of sharing a reference clock between a plurality of signal generating circuits, and generating a rotation control signal and an exposure signal in the plurality of respective signal generating circuits; and
a step of forming a pattern on an outer peripheral surface of the substrate by rotating the substrate about a central axis of the substrate on a basis of the rotation control signal and irradiating the outer peripheral surface of the substrate with a laser beam on a basis of the exposure signal while performing scanning in an axial direction of the substrate,
wherein a frequency of the rotation control signal is not an integral multiple of a frequency of the exposure signal, and wherein the phase of the exposure signal is inverted by 180° for each rotation.