US 12,083,558 B2
Ultrasonic device to suppress influence of crosstalk between channels
Chikara Kojima, Matsumoto (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Nov. 30, 2020, as Appl. No. 17/106,433.
Claims priority of application No. 2019-216434 (JP), filed on Nov. 29, 2019.
Prior Publication US 2021/0162463 A1, Jun. 3, 2021
Int. Cl. B06B 1/06 (2006.01)
CPC B06B 1/0629 (2013.01) 2 Claims
OG exemplary drawing
 
1. An ultrasonic device, comprising:
a substrate having a plurality of opening parts, and a plurality of walls disposed between the plurality of opening parts adjacent to each other;
a vibrating plate configured to close the plurality of opening parts; and
a plurality of vibrators on the vibrating plate at positions overlapping the plurality of opening parts when viewed from a stacking direction of the substrate and the vibrating plate, wherein
the plurality of vibrators includes a first vibrator, a second vibrator, and a third vibrator,
the plurality of opening parts includes a first opening part, a second opening part adjacent to the first opening part via a first wall of the plurality of walls, and a third opening part adjacent to the first opening part via a second wall of the plurality of walls,
a first vibrating section configured to close the first opening part and the first vibrator disposed in the first vibrating section constitute a first ultrasonic transmitter configured to transmit an ultrasonic wave,
a second vibrating section configured to close the second opening part and the second vibrator disposed in the second vibrating section constitute an ultrasonic receiver configured to receive an ultrasonic wave,
a third vibrating section configured to close the third opening part and the third vibrator disposed in the third vibrating section constitute a second ultrasonic transmitter configured to transmit an ultrasonic wave, and
a width of the first wall from the first opening part that overlaps the first vibrating section to the second opening part that overlaps the second vibrating section is larger than a width of the second wall from the first opening part to the third opening part that overlaps the third vibrating section, wherein the width of the first wall from the first opening part to the second opening part is no smaller than 40 μm, and the width of the second wall from the first opening part to the third opening part is smaller than 40 μm, and
a wall length of each of the plurality of walls from the vibrating plate to an end surface at an opposite side to the vibrating plate is no larger than 90 μm.