US 11,758,639 B2
Determining moving properties of a target in an extreme ultraviolet light source
Robert Jay Rafac, Encinitas, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Appl. No. 17/416,636
Filed by ASML Netherlands B.V., Veldhoven (NL)
PCT Filed Jan. 27, 2020, PCT No. PCT/EP2020/051867
§ 371(c)(1), (2) Date Jun. 21, 2021,
PCT Pub. No. WO2020/156975, PCT Pub. Date Aug. 6, 2020.
Claims priority of provisional application 62/798,725, filed on Jan. 30, 2019.
Prior Publication US 2022/0086998 A1, Mar. 17, 2022
Int. Cl. H05G 2/00 (2006.01); G01N 21/64 (2006.01)
CPC H05G 2/008 (2013.01) [G01N 21/6402 (2013.01); H05G 2/006 (2013.01)] 34 Claims
OG exemplary drawing
1. A method comprising:
enabling an interaction between a diagnostic system and a current target traveling along a trajectory toward a target space, the current target including a component that emits light when converted to plasma;
detecting first light at a first detection region, wherein the first light comprises light emitted from the plasma produced by a previous target and light produced from the enabled interaction between the current target and the diagnostic system;
detecting second light at a second detection region, wherein the second light comprises the light emitted from the previous target's plasma;
producing an analysis signal based on a first signal produced by the detected first light and a second signal produced by the detected second light; and
estimating a property of the current target based on the produced analysis signal.