US 11,756,182 B2
Pattern grouping method based on machine learning
Wei Fang, Milpitas, CA (US); Zhaohui Guo, San Jose, CA (US); Ruoyu Zhu, San Jose, CA (US); and Chuan Li, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Jul. 10, 2019, as Appl. No. 16/508,167.
Claims priority of provisional application 62/697,898, filed on Jul. 13, 2018.
Prior Publication US 2020/0020092 A1, Jan. 16, 2020
Int. Cl. G06T 7/00 (2017.01); G06F 18/24 (2023.01)
CPC G06T 7/001 (2013.01) [G06F 18/24 (2023.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01)] 18 Claims
OG exemplary drawing
1. A method for group mapping, comprising:
receiving an image of a first pattern;
generating a first fixed-dimensional feature vector using trained model parameters, the model parameters being based on the received image; and
assigning the first fixed-dimensional feature vector a first bucket identity (ID).