US 11,754,920 B2
Thermal acid generator and resist composition using same
Junya Miyake, Tokyo (JP); Yoshitomo Takeuchi, Tokyo (JP); Naomi Sato, Tokyo (JP); and Kentaro Kimura, Tokyo (JP)
Assigned to ADEKA CORPORATION, Tokyo (JP)
Filed on Mar. 10, 2022, as Appl. No. 17/691,718.
Application 17/691,718 is a division of application No. 16/071,397, granted, now 11,307,495, previously published as PCT/JP2017/002106, filed on Jan. 23, 2017.
Claims priority of application No. 2016-012814 (JP), filed on Jan. 26, 2016.
Prior Publication US 2022/0197136 A1, Jun. 23, 2022
Int. Cl. G03F 7/004 (2006.01); C07D 221/14 (2006.01)
CPC G03F 7/004 (2013.01) [C07D 221/14 (2013.01)] 6 Claims
1. A method of making a resist, said method comprising:
heating an acid-reactive organic substance and a thermal acid generator, wherein said heating of the thermal acid generator releases a Lewis acid to induce a polymerization or cross-linking of said acid-reactive organic substance to make said resist;
wherein the polymerization or cross-linking is performed at a heating condition of 200 to 300° C. for 1 to 100 minutes; and
wherein the thermal acid generator is

OG Complex Work Unit Chemistry
selected from the group consisting of:

OG Complex Work Unit Chemistry