US 11,754,906 B2
Hollow-core photonic crystal fiber based optical component for broadband radiation generation
Patrick Sebastian Uebel, Marloffstein (DE); Sebastian Thomas Bauerschmidt, Wendelstein (DE); and Peter Maximilian Götz, Altdorf (DE)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Jan. 5, 2023, as Appl. No. 18/93,717.
Application 18/093,717 is a continuation of application No. 17/485,836, filed on Sep. 27, 2021, granted, now 11,556,044.
Application 17/485,836 is a continuation of application No. 16/808,141, filed on Mar. 3, 2020, granted, now 11,163,208, issued on Nov. 2, 2021.
Claims priority of application No. 19160457 (EP), filed on Mar. 4, 2019.
Prior Publication US 2023/0146877 A1, May 11, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G02F 1/35 (2006.01); G02F 1/365 (2006.01)
CPC G02F 1/353 (2013.01) [G02F 1/3501 (2013.01); G02F 1/365 (2013.01); G02F 1/3503 (2021.01); G02F 1/3528 (2021.01)] 20 Claims
OG exemplary drawing
1. An optical component configured to function as an optical frequency converter in a broadband radiation source device, the optical component comprising:
a gas cell; and
a hollow-core photonic crystal fiber at least partially enclosed within the gas cell,
wherein the gas cell comprises a plurality of sub-cells, the plurality of sub-cells comprising:
two end sub-cells enclosing respective ends of the hollow-core photonic crystal fiber; and
a central sub-cell between the two end sub-cells.