US 11,754,622 B2
Thermal control system for an automated test system
Larry Wayne Akers, North Reading, MA (US); and Michael O. Mckenna, North Reading, MA (US)
Assigned to TERADYNE, INC., North Reading, MA (US)
Filed by Teradyne, Inc., North Reading, MA (US)
Filed on Oct. 22, 2020, as Appl. No. 17/77,816.
Prior Publication US 2022/0128625 A1, Apr. 28, 2022
Int. Cl. G01R 31/28 (2006.01); F25B 21/04 (2006.01); G01R 1/04 (2006.01)
CPC G01R 31/2891 (2013.01) [F25B 21/04 (2013.01); G01R 1/0458 (2013.01); G01R 31/2896 (2013.01)] 27 Claims
OG exemplary drawing
1. A test system comprising:
test sites for testing devices under test (DUTs), the test sites comprising a test site configured to hold a DUT for testing; and
a thermal control system to control a temperature of the DUT separately from control over temperatures of other DUTs in other test sites, the thermal control system comprising a thermoelectric cooler (TEC) and a structure that is thermally conductive, the TEC being in thermal communication with the DUT to control the temperature of the DUT by transferring heat between the DUT and the structure;
wherein the thermal control system comprises liquid coolant to flow through the structure to reduce a temperature of the structure.