US 11,754,515 B2
Transmissive small-angle scattering device
Naoki Matsushima, Tokyo (JP); Kiyoshi Ogata, Tokyo (JP); Sei Yoshihara, Saitama (JP); Yoshiyasu Ito, Tokyo (JP); Kazuhiko Omote, Tokyo (JP); Hiroshi Motono, Tokyo (JP); Shigematsu Asano, Tokyo (JP); Katsutaka Horada, Tokyo (JP); and Sensui Yasuda, Tokyo (JP)
Assigned to RIGAKU CORPORATION, Akishima (JP)
Appl. No. 17/442,169
Filed by RIGAKU CORPORATION, Akishima (JP)
PCT Filed Jan. 8, 2020, PCT No. PCT/JP2020/000234
§ 371(c)(1), (2) Date Sep. 23, 2021,
PCT Pub. No. WO2020/194986, PCT Pub. Date Oct. 1, 2020.
Claims priority of application No. 2019-065112 (JP), filed on Mar. 28, 2019.
Prior Publication US 2022/0170869 A1, Jun. 2, 2022
Int. Cl. G01N 23/201 (2018.01); G01N 23/20016 (2018.01); G01N 23/20025 (2018.01)
CPC G01N 23/201 (2013.01) [G01N 23/20016 (2013.01); G01N 23/20025 (2013.01); G01N 2223/054 (2013.01); G01N 2223/3306 (2013.01); G01N 2223/6116 (2013.01)] 6 Claims
OG exemplary drawing
1. A transmission type small-angle scattering device comprising:
a sample holder in which a sample as an inspection target is placed;
a sample positioning mechanism for moving the sample holder;
a goniometer including a rotation arm;
an X-ray irradiation unit installed on the rotation arm; and
a two-dimensional X-ray detector installed on the rotation arm,
wherein the rotation arm is freely turnable around a θ-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin;
the X-ray irradiation unit is installed on a lower-side end portion of the rotation arm;
the two-dimensional X-ray detector is installed on an upper-side end portion of the rotation arm;
the X-ray irradiation unit irradiates the sample placed in the sample holder with focused X-rays from a lower side of the sample; and
the two-dimensional X-ray detector detects scatter X-rays generated around the focused X-rays transmitted through the sample at a position above the sample.