US 12,414,401 B2
Method for manufacturing substrate for solar cell and substrate for solar cell
Hiroyuki Otsuka, Karuizawa-machi (JP); and Shozo Shirai, Takasaki (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed by SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed on Jan. 2, 2020, as Appl. No. 16/732,954.
Application 16/732,954 is a division of application No. 15/538,893, granted, now 11,901,475, previously published as PCT/JP2015/005846, filed on Nov. 25, 2015.
Claims priority of application No. 2015-000554 (JP), filed on Jan. 5, 2015.
Prior Publication US 2020/0144441 A1, May 7, 2020
Int. Cl. C30B 29/06 (2006.01); C30B 31/08 (2006.01); C30B 31/18 (2006.01); C30B 33/02 (2006.01); H01L 21/22 (2006.01); H01L 21/324 (2006.01); H10F 10/14 (2025.01); H10F 71/00 (2025.01); H10F 77/1223 (2025.01)
CPC H10F 71/121 (2025.01) [C30B 29/06 (2013.01); C30B 31/08 (2013.01); C30B 31/185 (2013.01); C30B 33/02 (2013.01); H01L 21/22 (2013.01); H01L 21/324 (2013.01); H10F 10/14 (2025.01); H10F 71/128 (2025.01); H10F 77/1223 (2025.01); Y02E 10/547 (2013.01); Y02P 70/50 (2015.11)] 10 Claims
OG exemplary drawing
 
1. A solar cell comprising
a CZ silicon single crystal substrate doped with a p type dopant or an n type dopant and containing 12 ppm or more oxygen atoms and provided with texture formed on a light-receiving surface of the silicon single crystal substrate to reduce reflectance of light of the light-receiving surface of the silicon single crystal substrate,
a light-receiving surface electrode formed on the light-receiving surface of the silicon single crystal substrate, and
a back surface electrode formed on a backside of the silicon single crystal substrate,
wherein in the silicon single crystal substrate provided with the texture, oxide precipitate nuclei are previously dissolved and a solid solution containing oxygen atoms is formed uniformly throughout the substrate, and wherein the silicon single crystal substrate is free from spiral oxygen-induced defects that are observed as a spiral pattern in an EL (electroluminescence) image in the solar cell after fabrication of the solar cell.